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Dynamic high temperature reverse bias reliability test system(DHTRB2000)

The system performs dynamic high temperature reverse bias burn-in test for SiC MOS transistor with reference to AQG324 test method. Up to 12 stations can be tested in each test area, with independent pulse source configurations. RT~200°C test temperature is available for the device. It has the function of short-circuit disengagement test of test device, which can automatically detach the faulty device from the burn-in test without affecting the normal test of other devices.

Function

  • dv/dt>50V/ns (Coss<300pF)
  • 2us overcurrent protection
  • It can be heated independently at room temperature RT~200°C, and is compatible with static HTRB test
  • Full experimenter human safety considerations are set

Product Features

Test temperature

RT~200°C (thermal plate)

Test zone

8 (scalable)

Stations per zone

12 (typical)

Test Method

VDS > 0.5VDS,max, Active: VGS, off = VGS, off, recom and
VGS, on = VGS, on, recom  Passive: VGS = VGS, off, recom

Voltage range

0V~2000V (Customizable up to 10000V)

Voltage accuracy

Detection deviation: ±(1%+1V)

Pulse control

1. Pulse frequency (square wave): 0kHz~200kHz;
    Accuracy: 1%±2LSB
    (The maximum frequency depends on the voltage,
    DUT capacitance)
2. Square wave duty cycle 20%~80%: Accuracy: ±1%
3. Voltage rise rate (dv/dt) ≥50V/ns (Coss < 300pF)
4. Voltage overshoot<15%VDS
5. DVDT Software Programmable

VGS voltage range

Active: -20V~0V, Passive: -30V~30V

Leakage current detection

Covers: 1nA~100mA,
1nA~1000nA, Accuracy better than 0.1%±2nA
1uA~1000uA, Accuracy better than 0.1%±50nA
1mA~100mA, Accuracy better than 0.1%±10uA
Auto-ranging for leakage current measurement.

Machine power supply

Three-phase AC380V±38V

Total weight

700Kg (typical)

Dimensions of machine

800mm(W)x1400mm(D)x1950mm(H)


Applicable standards

AEC Q101、AQG 324、JEDEC JEP183A、JESD 22-A108

Applicable components

For SiC MOSFET, GaN transistor, IGBT module